Issued Patents 2016
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496167 | Integrated bit-line airgap formation and gate stack post clean | Vinod R. Purayath, Randhir P. S. Thakur, Nitin K. Ingle | 2016-11-15 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9404178 | Surface treatment and deposition for reduced outgassing | Jingmei Liang, Xiaolin Chen, Nitin K. Ingle | 2016-08-02 |
| 9406523 | Highly selective doped oxide removal method | Zhijun Chen, Zihui Li, Nitin K. Ingle, Anchuan Wang | 2016-08-02 |
| 9378978 | Integrated oxide recess and floating gate fin trimming | Vinod R. Purayath, Randhir P. S. Thakur, Nitin K. Ingle | 2016-06-28 |
| 9373517 | Semiconductor processing with DC assisted RF power for improved control | Jang-Gyoo Yang, Xinglong Chen, Soonam Park, Jonghoon Baek, Saurabh Garg | 2016-06-21 |
| 9362130 | Enhanced etching processes using remote plasma sources | Nitin K. Ingle, Dmitry Lubomirsky, Xinglong Chen | 2016-06-07 |
| 9285168 | Module for ozone cure and post-cure moisture treatment | Dmitry Lubomirsky, Jay D. Pinson, II, Kirby H. Floyd, Adib Khan | 2016-03-15 |