Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496167 | Integrated bit-line airgap formation and gate stack post clean | Vinod R. Purayath, Shankar Venkataraman, Nitin K. Ingle | 2016-11-15 |
| 9449850 | Processing systems and methods for halide scavenging | Anchuan Wang, Xinglong Chen, Zihui Li, Hiroshi Hamana, Zhijun Chen +5 more | 2016-09-20 |
| 9431267 | Semiconductor device processing tools and methods for patterning substrates | Mayur Trivedi, Sushil Padiyar, Lakshmanan Karuppiah | 2016-08-30 |
| 9378978 | Integrated oxide recess and floating gate fin trimming | Vinod R. Purayath, Shankar Venkataraman, Nitin K. Ingle | 2016-06-28 |