Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472475 | Feedback control using detection of clearance and adjustment for uniform topography | Kun Xu, Ingemar Carlsson, Tzu-Yu Liu, Shih-Haur Shen, Boguslaw A. Swedek +1 more | 2016-10-18 |
| 9431267 | Semiconductor device processing tools and methods for patterning substrates | Mayur Trivedi, Sushil Padiyar, Randhir P. S. Thakur | 2016-08-30 |