Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9267739 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Alexander Tam | 2016-02-23 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9267739 | Pedestal with multi-zone temperature control and multiple purge capabilities | Xinglong Chen, Jang-Gyoo Yang, Alexander Tam | 2016-02-23 |