Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472417 | Plasma-free metal etch | Nitin K. Ingle, Jessica S. Kachian, Soonam Park, Xikun Wang, Jeffrey W. Anthis | 2016-10-18 |
| 9349605 | Oxide etch selectivity systems and methods | Zhijun Chen, Anchuan Wang, Son T. Nguyen | 2016-05-24 |
| 9299582 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Soonam Park, Xikun Wang, Jeffrey W. Anthis | 2016-03-29 |
| 9287134 | Titanium oxide etch | Xikun Wang, Anchuan Wang, Nitin K. Ingle | 2016-03-15 |