Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9499898 | Layered thin film heater and method of fabrication | Dmitry Lubomirsky | 2016-11-22 |
| 9349605 | Oxide etch selectivity systems and methods | Lin Xu, Zhijun Chen, Anchuan Wang | 2016-05-24 |
| 9312154 | CVD apparatus for improved film thickness non-uniformity and particle performance | Binh Tran, Anqing Cui, Bernard L. Hwang, Anh N. Nguyen, Sean M. Seutter +1 more | 2016-04-12 |
| 9303318 | Multiple complementary gas distribution assemblies | Tuoh Bin Ng, Yuriy Melnik, Lily Pang, Eda Tuncel, Lu Chen | 2016-04-05 |