Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope +1 more | 2016-12-27 |
| 9472417 | Plasma-free metal etch | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Xikun Wang | 2016-10-18 |
| 9449843 | Selectively etching metals and metal nitrides conformally | Mikhail Korolik, Nitin K. Ingle, David Thompson, David Knapp, Benjamin Schmiege | 2016-09-20 |
| 9390940 | Methods of etching films comprising transition metals | Benjamin Schmiege, David Thompson | 2016-07-12 |
| 9328415 | Methods for the deposition of manganese-containing films using diazabutadiene-based precursors | David Thompson | 2016-05-03 |
| 9309598 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Benjamin Schmiege | 2016-04-12 |
| 9299582 | Selective etch for metal-containing materials | Nitin K. Ingle, Jessica S. Kachian, Lin Xu, Soonam Park, Xikun Wang | 2016-03-29 |