Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope +1 more | 2016-12-27 | $14,994,000 |
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju +1 more | 2016-12-06 | $23,225,000 |
| 9449843 | Selectively etching metals and metal nitrides conformally | Mikhail Korolik, Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, David Knapp | 2016-09-20 | $12,933,000 |
| 9390940 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2016-07-12 | $13,832,000 |
| 9309598 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis | 2016-04-12 | $12,337,000 |