Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope +1 more | 2016-12-27 |
| 9514933 | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition | Yu Lei, Srinivas Gandikota, Seshadri Ganguli, Bo Zheng, Rajkumar Jakkaraju +1 more | 2016-12-06 |
| 9449843 | Selectively etching metals and metal nitrides conformally | Mikhail Korolik, Nitin K. Ingle, David Thompson, Jeffrey W. Anthis, David Knapp | 2016-09-20 |
| 9390940 | Methods of etching films comprising transition metals | Jeffrey W. Anthis, David Thompson | 2016-07-12 |
| 9309598 | Oxide and metal removal | Xikun Wang, Jie Liu, Anchuan Wang, Nitin K. Ingle, Jeffrey W. Anthis | 2016-04-12 |