Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 | $14,994,000 |