Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Bhushan Zope, Jeffrey W. Anthis +1 more | 2016-12-27 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Bhushan Zope, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2016-05-03 |
| 9275865 | Plasma treatment of film for impurity removal | Benjamin C. Wang, Joshua Collins, Michael S. Jackson, Amit Khandelwal | 2016-03-01 |
| 9230815 | Methods for depositing fluorine/carbon-free conformal tungsten | Xinyu Fu, Srinivas Gandikota, Atif Noori, Mei Chang, David Thompson +1 more | 2016-01-05 |
| 9230835 | Integrated platform for fabricating n-type metal oxide semiconductor (NMOS) devices | Srinivas Gandikota, Seshadri Ganguli, Xinyu Fu, Bo Zheng, Yu Lei | 2016-01-05 |