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Method for cleaning titanium alloy deposition |
Srinivas Gandikota, Xinliang Lu, Kyoung-Ho BU, Jing Zhou, Seshadri Ganguli |
2016-12-27 |
| 9449843 |
Selectively etching metals and metal nitrides conformally |
Mikhail Korolik, Nitin K. Ingle, Jeffrey W. Anthis, David Knapp, Benjamin Schmiege |
2016-09-20 |
| 9434155 |
Method and system for printhead alignment based on print medium width |
Michael J. Linder, Paul S. Bonino |
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| 9390940 |
Methods of etching films comprising transition metals |
Jeffrey W. Anthis, Benjamin Schmiege |
2016-07-12 |
| 9382270 |
Substituted silacyclopropane precursors and their use for the deposition of silicon-containing films |
Mark Saly |
2016-07-05 |
| 9328415 |
Methods for the deposition of manganese-containing films using diazabutadiene-based precursors |
Jeffrey W. Anthis |
2016-05-03 |
| 9269574 |
Methods of fabricating dielectric films from metal amidinate precursors |
Steven C. H. Hung, Atif Noori, Yoshihide Senzaki |
2016-02-23 |