Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520284 | Ion beam activated directional deposition | Tsung-Liang Chen | 2016-12-13 |
| 9382270 | Substituted silacyclopropane precursors and their use for the deposition of silicon-containing films | David Thompson | 2016-07-05 |