Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412579 | Methods and apparatus for controlling substrate uniformity | Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, David H. Quach, Sean S. Kang | 2016-08-09 |
| 9384979 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Dae-Han Choi, Jisoo Kim, Eric A. Hudson, Sangheon Lee, Conan Chiang | 2016-07-05 |