Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9384979 | Apparatus for the deposition of a conformal film on a substrate and methods therefor | Jisoo Kim, Eric A. Hudson, Sangheon Lee, Conan Chiang, S. M. Reza Sadjadi | 2016-07-05 |