Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, John Zheng Ye, David H. Quach, Sean S. Kang | 2016-08-09 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Biraja P. Kanungo, Ren-Guan Duan, Junhan Yuh, Dmitry Lubomirsky | 2016-07-19 |
| 9338871 | Feedforward temperature control for plasma processing apparatus | Chetan Mahadeswaraswamy, Walter R. Merry, Sergio Fukuda Shoji, Chunlei Zhang, Yashaswini B. Pattar +7 more | 2016-05-10 |