Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9440886 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2016-09-13 |
| 9420639 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2016-08-16 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky | 2016-07-19 |
| 9343289 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2016-05-17 |