Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520302 | Methods for controlling Fin recess loading | Jungmin Ko, Kwang Soo Kim, Olivier Luere | 2016-12-13 |
| 9514953 | Methods for barrier layer removal | Chia-Ling Kao, Jeremiah T. Pender, Srinivas D. Nemani, He Ren, Mehul Naik | 2016-12-06 |
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Tom Choi, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2016-10-25 |
| 9412579 | Methods and apparatus for controlling substrate uniformity | S. M. Reza Sadjadi, Dmitry Lubomirsky, Hamid Noorbakhsh, John Zheng Ye, David H. Quach | 2016-08-09 |
| 9368369 | Methods for forming a self-aligned contact via selective lateral etch | Jungmin Ko | 2016-06-14 |
| 9299577 | Methods for etching a dielectric barrier layer in a dual damascene structure | He Ren, Chia-Ling Kao, Jeremiah T. Pender, Srinivas D. Nemani, Mehul Naik | 2016-03-29 |
| 9269590 | Spacer formation | Olivier Luere, Srinivas D. Nemani | 2016-02-23 |