Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514953 | Methods for barrier layer removal | Chia-Ling Kao, Sean S. Kang, Srinivas D. Nemani, He Ren, Mehul Naik | 2016-12-06 |
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Tom Choi, Sean S. Kang, Srinivas D. Nemani +1 more | 2016-10-25 |
| 9299577 | Methods for etching a dielectric barrier layer in a dual damascene structure | He Ren, Chia-Ling Kao, Sean S. Kang, Srinivas D. Nemani, Mehul Naik | 2016-03-29 |