Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478433 | Cyclic spacer etching process with improved profile control | Jungmin Ko, Tom Choi, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2016-10-25 |
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Chinh Dinh, Srinivas D. Nemani, Andrew Nguyen | 2016-06-14 |