Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2016-10-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478433 | Cyclic spacer etching process with improved profile control | Qingjun Zhou, Jungmin Ko, Sean S. Kang, Jeremiah T. Pender, Srinivas D. Nemani +1 more | 2016-10-25 |