Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Qingjun Zhou, Srinivas D. Nemani, Andrew Nguyen | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Qingjun Zhou, Srinivas D. Nemani, Andrew Nguyen | 2016-06-14 |