Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520302 | Methods for controlling Fin recess loading | Jungmin Ko, Sean S. Kang, Kwang Soo Kim | 2016-12-13 |
| 9281190 | Local and global reduction of critical dimension (CD) asymmetry in etch processing | Kang-Lie Chiang, Jinhan Choi | 2016-03-08 |
| 9269590 | Spacer formation | Sean S. Kang, Srinivas D. Nemani | 2016-02-23 |