Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425058 | Simplified litho-etch-litho-etch process | Hun Sang Kim, Shinichi Koseki | 2016-08-23 |
| 9281190 | Local and global reduction of critical dimension (CD) asymmetry in etch processing | Kang-Lie Chiang, Olivier Luere | 2016-03-08 |