Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425058 | Simplified litho-etch-litho-etch process | Jinhan Choi, Shinichi Koseki | 2016-08-23 |
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Jun Wan Kim, Wonmo Ahn, Jeong Hyun Yoo | 2016-03-15 |