Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418867 | Mask passivation using plasma | Byungkook Kong, Hung Sang Kim, Hoon Sang Lee, Jeong Hyun Yoo | 2016-08-16 |
| 9287124 | Method of etching a boron doped carbon hardmask | Byungkook Kong, Wonmo Ahn, Jeong Hyun Yoo, Hun Sang Kim | 2016-03-15 |