Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418867 | Mask passivation using plasma | Hung Sang Kim, Hoon Sang Lee, Jeong Hyun Yoo, Jun Wan Kim | 2016-08-16 |
| 9390923 | Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process | Jeong Hyun Yoo, Hoon Sang Lee | 2016-07-12 |
| 9299580 | High aspect ratio plasma etch for 3D NAND semiconductor applications | Gene Lee, Liming Yang | 2016-03-29 |
| 9287124 | Method of etching a boron doped carbon hardmask | Jun Wan Kim, Wonmo Ahn, Jeong Hyun Yoo, Hun Sang Kim | 2016-03-15 |