Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281166 | Plasma processing chamber for bevel edge processing | Andrew D. Bailey, III | 2016-03-08 |
| 9275838 | Arrangements for manipulating plasma confinement within a plasma processing system and methods thereof | Eller Y. Juco, Neungho Shin, Andrew D. Bailey, III | 2016-03-01 |