Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9412613 | Development of high etch selective hardmask material by ion implantation into amorphous carbon films | Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Jun Xue, Mukund Srinivasan +2 more | 2016-08-09 | $15,983,000 |
| 9406509 | Deposition of heteroatom-doped carbon films | Abhijit Basu Mallick, Mukund Srinivasan | 2016-08-02 | $10,698,000 |
| 9337051 | Method for critical dimension reduction using conformal carbon films | Bencherki Mebarki, Bok Hoen Kim, Deenesh Padhi, Li Yan Miao, Christopher Dennis Bencher +4 more | 2016-05-10 | $10,962,000 |
| 9257330 | Ultra-thin structure to protect copper and method of preparation | Amit Chatterjee, Geetika Bajaj, He Ren, Tapash Chakraborty, Srinivas D. Nemani +3 more | 2016-02-09 | $18,126,000 |