Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412581 | Low-K dielectric gapfill by flowable deposition | Kiran V. Thadani, Jingmei Liang, Young S. Lee | 2016-08-09 |
| 9412613 | Development of high etch selective hardmask material by ion implantation into amorphous carbon films | Pramit Manna, Abhijit Basu Mallick, Ludovic Godet, Yongmei Chen, Jun Xue +2 more | 2016-08-09 |
| 9406509 | Deposition of heteroatom-doped carbon films | Pramit Manna, Abhijit Basu Mallick | 2016-08-02 |