Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418858 | Selective etch of silicon by way of metastable hydrogen termination | Anchuan Wang, Jingchun Zhang, Nitin K. Ingle | 2016-08-16 |
| 9412581 | Low-K dielectric gapfill by flowable deposition | Kiran V. Thadani, Jingmei Liang, Mukund Srinivasan | 2016-08-09 |
| 9236266 | Dry-etch for silicon-and-carbon-containing films | Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Yunyu Wang | 2016-01-12 |