Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236266 | Dry-etch for silicon-and-carbon-containing films | Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Young S. Lee | 2016-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236266 | Dry-etch for silicon-and-carbon-containing films | Jingchun Zhang, Anchuan Wang, Nitin K. Ingle, Young S. Lee | 2016-01-12 |