Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Daniel Lee Diehl, Huixiong Dai, Yong Cao, Tingjun Xu +1 more | 2016-10-25 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478421 | Optically tuned hardmask for multi-patterning applications | Christopher Dennis Bencher, Daniel Lee Diehl, Huixiong Dai, Yong Cao, Tingjun Xu +1 more | 2016-10-25 |