Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9411237 | Resist hardening and development processes for semiconductor device manufacturing | Peng Xie, Christopher Dennis Bencher, Huixiong Dai, Subhash Deshmukh | 2016-08-09 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Cara Beasley, Ralf Hofmann, Majeed A. Foad | 2016-05-31 |
| 9317922 | Image and part recognition technology | Jason E. Meiring, C. Grant Willson | 2016-04-19 |
| 9236467 | Atomic layer deposition of hafnium or zirconium alloy films | Timothy Weidman, Paul F. Ma, Paul Deaton | 2016-01-12 |