Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Soumendra N. Barman, Abhijit Basu Mallick, Ralf Hofmann, Nitin K. Ingle | 2016-08-16 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Ralf Hofmann, Majeed A. Foad, Timothy Michaelson | 2016-05-31 |