Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417515 | Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor | Soumendra N. Barman, Cara Beasley, Abhijit Basu Mallick, Nitin K. Ingle | 2016-08-16 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Cara Beasley, Majeed A. Foad, Timothy Michaelson | 2016-05-31 |
| 9343347 | Portable electrostatic chuck carrier for thin substrates | Dieter Haas, Majeed A. Foad | 2016-05-17 |
| 9325007 | Shadow mask alignment and management system | Byung Sung Kwak, Stefan Bangert, Michael Koenig | 2016-04-26 |