Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9508375 | Modification of magnetic properties of films using ion and neutral beam implantation | Nir Merry | 2016-11-29 |
| 9354508 | Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor | Cara Beasley, Ralf Hofmann, Timothy Michaelson | 2016-05-31 |
| 9343347 | Portable electrostatic chuck carrier for thin substrates | Dieter Haas, Ralf Hofmann | 2016-05-17 |
| 9263078 | Patterning of magnetic thin film using energized ions | Steven Verhaverbeke, Omkaram Nalamasu, Mahalingam Venkatesan, Nety M. Krishna | 2016-02-16 |