Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466524 | Method of depositing metals using high frequency plasma | Guojun Liu, Annamalai Lakshmanan, Dien-Yeh Wu, Anantha K. Subramani | 2016-10-11 |
| 9460932 | Surface poisoning using ALD for high selectivity deposition of high aspect ratio features | Jiang Lu, Guodan Wei | 2016-10-04 |
| 9418890 | Method for tuning a deposition rate during an atomic layer deposition process | Joseph AuBuchon, Jiang Lu, Mei Chang | 2016-08-16 |
| 9236467 | Atomic layer deposition of hafnium or zirconium alloy films | Timothy Weidman, Timothy Michaelson, Paul Deaton | 2016-01-12 |