Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466524 | Method of depositing metals using high frequency plasma | Paul F. Ma, Guojun Liu, Annamalai Lakshmanan, Anantha K. Subramani | 2016-10-11 |
| 9447497 | Processing chamber gas delivery system with hot-swappable ampoule | Mark S. Johnson, David Santi, Hyman Lam | 2016-09-20 |