Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447497 | Processing chamber gas delivery system with hot-swappable ampoule | Dien-Yeh Wu, Mark S. Johnson, David Santi | 2016-09-20 |
| 9252024 | Deposition chambers with UV treatment and methods of use | Nicholas R. Denny, Joseph AuBuchon, Mei Chang | 2016-02-02 |