Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252024 | Deposition chambers with UV treatment and methods of use | Hyman Lam, Joseph AuBuchon, Mei Chang | 2016-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9252024 | Deposition chambers with UV treatment and methods of use | Hyman Lam, Joseph AuBuchon, Mei Chang | 2016-02-02 |