Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447497 | Processing chamber gas delivery system with hot-swappable ampoule | Dien-Yeh Wu, Mark S. Johnson, Hyman Lam | 2016-09-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447497 | Processing chamber gas delivery system with hot-swappable ampoule | Dien-Yeh Wu, Mark S. Johnson, Hyman Lam | 2016-09-20 |