Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460959 | Methods for pre-cleaning conductive interconnect structures | Xiangjin Xie, Feng Q. Liu, Daping Yao, Alexander Jansen, Joung Joo Lee +2 more | 2016-10-04 |
| 9418890 | Method for tuning a deposition rate during an atomic layer deposition process | Paul F. Ma, Joseph AuBuchon, Jiang Lu | 2016-08-16 |
| 9399812 | Methods of preventing plasma induced damage during substrate processing | Ashish Bodke, Zhigang Xie | 2016-07-26 |
| 9245769 | Directional SiO2 etch using plasma pre-treatment and high-temperature etchant deposition | David T. Or, Joshua Collins | 2016-01-26 |