Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399812 | Methods of preventing plasma induced damage during substrate processing | Ashish Bodke, Mei Chang | 2016-07-26 |
| 9281436 | Radio-frequency sputtering system with rotary target for fabricating solar cells | Wei Wang, Zheng Xu, Jianming Fu | 2016-03-08 |