Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245769 | Directional SiO2 etch using plasma pre-treatment and high-temperature etchant deposition | Joshua Collins, Mei Chang | 2016-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9245769 | Directional SiO2 etch using plasma pre-treatment and high-temperature etchant deposition | Joshua Collins, Mei Chang | 2016-01-26 |