Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460932 | Surface poisoning using ALD for high selectivity deposition of high aspect ratio features | Paul F. Ma, Jiang Lu | 2016-10-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460932 | Surface poisoning using ALD for high selectivity deposition of high aspect ratio features | Paul F. Ma, Jiang Lu | 2016-10-04 |