Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236467 | Atomic layer deposition of hafnium or zirconium alloy films | Timothy Weidman, Timothy Michaelson, Paul F. Ma | 2016-01-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9236467 | Atomic layer deposition of hafnium or zirconium alloy films | Timothy Weidman, Timothy Michaelson, Paul F. Ma | 2016-01-12 |