SC

Shengwu Chang

VA Varian Semiconductor Equipment Associates: 5 patents #6 of 120Top 5%
🗺 Massachusetts: #492 of 12,163 inventorsTop 5%
Overall (2016): #23,822 of 481,213Top 5%
5
Patents 2016

Issued Patents 2016

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
9520204 Cold stripper for high energy ion implanter with tandem accelerator 2016-12-13
9437341 Method and apparatus for generating high current negative hydrogen ion beam 2016-09-06
9396903 Apparatus and method to control ion beam current Kristen Rounds, William Leavitt, Michael St. Peter 2016-07-19
9281165 Bias electrodes for tandem accelerator Christopher Lupoli, William Davis Lee, Frank Sinclair, James Alan Pixley 2016-03-08
9263231 Moveable current sensor for increasing ion beam utilization during ion implantation 2016-02-16