Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287148 | Dynamic heating method and system for wafer processing | Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Jason M. Schaller, Robert Brent Vopat | 2016-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9287148 | Dynamic heating method and system for wafer processing | Kevin Anglin, D. Jeffrey Lischer, William T. Weaver, Jason M. Schaller, Robert Brent Vopat | 2016-03-15 |