Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464732 | Apparatus for uniform pumping within a substrate process chamber | Paul B. Reuter, Martin Jeffrey Salinas, Imad Yousif | 2016-10-11 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464732 | Apparatus for uniform pumping within a substrate process chamber | Paul B. Reuter, Martin Jeffrey Salinas, Imad Yousif | 2016-10-11 |