Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514969 | Apparatus for reducing the effect of contamination on a rapid thermal process | Aaron Miller, Norman L. Tam, Michael S. Liu | 2016-12-06 |
| 9385004 | Support cylinder for thermal processing chamber | Aaron Muir Hunter, Joseph M. Ranish, Norman L. Tam, Jeffrey Tobin, Jiping Li +1 more | 2016-07-05 |
| 9330955 | Support ring with masked edge | Norman L. Tam, Aaron Muir Hunter, Joseph M. Ranish, Koji Nakanishi, Toshiyuki Nakagawa | 2016-05-03 |